Process Chillers for Semiconductor Test Applications

As the processors that run inside popular electronic equipment such as smartphones, personal computers, servers, and industrial routers double their performance every 12-18 months, new fluid cooled test systems have entered the market. These test systems, and their extraordinary requirements for efficiency and reliability, have set the bar high for process chiller manufacturers.

Legacy manufactures the leading line of semiconductor test process chillers for brands like Hewlett Packard, Agilent, Verigy, LTX Fusion, and more.

The Legacy Chillers value proposition: Each of our semi-conductor cooling chillers is specifically designed to meet the 24/7/365 demands of your semi application. Prior to shipment, each process chiller is load tested while undergoing a rigorous quality control process. Our process chiller control system provides all of the latest features the market demands. For more information on how Legacy Process Chiller products compare to many of the other chiller brands on the market have a look at our Process Chiller Buyer’s Guide, available for download.

To make your selection of the correct glycol process chiller easier, Legacy has developed OEM designs for many of the most common process chillers used for Brewery’s, Distillery’s and other Fermentation production. If you don’t see Glycol chiller for your specific requirement below, not to worry, we have dedicated process chiller application engineers available to assist you. Just give us a call at 877-988-5464.

Why Choose a Legacy Process Chiller for your Semiconductor Test Applications?

Semiconductor Test Process Chiller Statement of Value: Each of our fluid cooling systems are specifically designed to meet the 24/7/365 demands of this highly demanding, Mission Critical market. During production each, built to order, chiller undergoes rigorous quality control with extensive QC during and after final load testing.

Standard Features

Partial List for Glycol Cooling Applications

-> ETL listed US/C

-> Industrial trade PLC with high resolution touch screen.

->  Closed (SS) storage tank on with separate dedicated recirc pump.

-> Fused, STAINLESS STEEL Process pump w/ discharge ball valve.

-> STAINLESS STEEL, brazed plate evaporator.

-> Hot Gas Bypass Capacity Control.

->  Painted (Powder Coated), galvanized sheet metal cabinet.

->  Low ambient package rated down to 38F.

->  Dedicated recirculation pump proving temp stability to process.

-> QUICK SHIP program available.

-> Built in Web Server with data logging and email alerts.

->  Post metal production powder coat paint.

-> monitor/control from any web enabled device using any web browser.

->  Factory QC under lead prior to ship.

->  Machine bent tubing, 80% less brazed fittings.

->  MANUFACTURED IN THE USA!

->  QUICK SHIP AVAILABLE FOR MOST MODELS

Available Factory Options

Partial List for Glycol Applications

->  E-Coat coastal protection.

->  Low ambient control options down to -20F ambient.

->  Patented Economizer System that can reduce energy usage as much as 60%.

->  BacNet data communications TCP/IP or Serial.

->  Remote wall mounted touch screen.

->  Voltage and Phase monitoring and protection.

->  VFD lead compressor / PLC controlled.

-> VFD System pump / PLC Controlled.

-> VFD head pressure control (Air-Cooled Models).

->  Dual pump with auto changeover / auto lag lead.

->  Many system pump configurations to choose from.

->  Open vented storage tank as alternate to closed SS.

Comment about tables below: Process chiller assignments nested into the tables below are based on available information at the time we generated them. As with many industries, technical characteristics are very dynamic, tending to change often. As such ALWAYS check with your Legacy Process Engineer prior to specifying or purchasing your process chiller. The operating conditions used to assign process chillers in the tables below are 95F ambient (Air-Cooled) and 105F condensing (or 75F entering water temp for Water-Cooled) and 45F leaving WATER ONLY temp going to the process. If your conditions vary from these industry standards, please contact Legacy Chillers (877-988-5464) for an updated selection.

Comment about tables below: As with many industries, technical characteristics are very dynamic, tending to change often. As such ALWAYS check with your Legacy Process Engineer prior to specifying or purchasing your process chiller. The operating conditions used to assign process chillers in the tables below are 95F ambient (Air-Cooled) and 105F condensing (or 75F entering water temp for Water-Cooled) and 50F leaving WATER ONLY temp going to the process. If your conditions vary from these industry standards, please contact Legacy Chillers for an updated selection.

HP, Agilent, and LTX Chillers

In the table provided below you will find our current list of process chillers for HP, Agilent, and LTX semi-conductor applications.

Air-cooled Process Chillers, Packaged, Single Stage Scroll, with Tank

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
PZAT1SPZAT1S14,000 BTUH36.034.068.0550.0
PZAT1.5SPZAT1.5S18,000 BTUH36.034.068.0600.0
PZAT2SPZAT2S22,000 BTUH36.034.068.0650.0
PZAT2.5SPZAT2.5S28,800 BTUH36.034.068.0700.0
PZAT3SPZAT3S36,000 BTUH46.034.072.0800.0
PZAT4SPZAT4S49,200 BTUH46.034.072.0850.0
PZAT4.5SPZAT4.5S51,600 BTUH46.034.072.0875.0
PZAT5SPZAT5S55,200 BTUH46.034.072.0900.0
PZAT7SPZAT7S75,600 BTUH75.034.072.01100.0
PZAT8SPZAT8S84,000 BTUH75.034.072.01150.0
PZAT9SPZAT9S98,400 BTUH75.034.072.01250.0
PZAT11SPZAT11S112,400 BTUH75.034.072.01300.0

Air-cooled Process Chillers, Packaged, Dual Stage Scroll, with Tank

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
PZAT7DPZAT7D73,200 BTUH75.034.077.01100.0
PZAT9DPZAT9D96,000 BTUH75.034.077.01200.0
PZAT9.5DPZAT9.5D102,000 BTUH75.034.077.01250.0
PZAT10DPZAT10D108,000 BTUH75.034.077.01250.0
PZAT13DPZAT13D147,000 BTUH85.040.077.01300.0
PZAT15DPZAT15D167,000 BTUH85.040.077.01400.0
PZAT18DPZAT18D190,800 BTUH85.040.077.01450.0
PZAT22DPZAT22D264,000 BTUH75.065.077.01450.0
PZA22DPZA22D264,200 BTUH66.075.051.01150.0
PZA26DPZA26D302,000 BTUH180.046.054.02600.0
PZA35DPZA35D406,000 BTUH180.088.054.02900.0
PZA43DPZA43D500,000 BTUH180.088.054.03200.0

Water-cooled Process Chillers, Packaged, Single Stage Scroll, with Tank

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
PZWT1SPZW1S12,100 BTUH36.034.064.5550.0
PZWT1.5SPZWT1.5S19,200 BTUH36.034.064.5600.0
PZWT2SPZWT2S22,200 BTUH36.034.064.5650.0
PZWT2.5SPZWT2.5S34,300 BTUH36.034.064.5700.0
PZWT3SPZWT3S40,300 BTUH36.034.064.5800.0
PZWT4SPZWT4S49,300 BTUH46.034.069.0850.0
PZWT4.5SPZWT4.5S52,000 BTUH46.034.069.0875.0
PZWT5SPZWT5S60,100 BTUH46.034.069.0900.0
PZWT7SPZWT7S78,200 BTUH46.034.065.01100.0
PZWT8SPZWT8S88,500 BTUH75.034.070.01150.0
PZWT9SPZWT9S104,000 BTUH75.034.070.01250.0
PZWT11SPZWT11S129,500 BTUH75.034.070.01300.0

Water-cooled Process Chillers, Packaged, Dual Stage Scroll, with Tank

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
PZWT7DPZWT7D80,600 BTUH75.034.070.01350.0
PZWT9DPZWT9D98,600 BTUH75.034.070.01400.0
PZWT9.5DPZWT9.5D104,000 BTUH75.034.070.01450.0
PZWT10DPZWT10D120,200 BTUH75.034.070.01500.0
PZWT13DPZWT13D156,400 BTUH75.034.070.01700.0
PZWT15DPZWT15D177,000 BTUH85.034.070.01800.0
PZWT18DPZWT18D208,000 BTUH85.034.070.01900.0
PZWT22DPZWT22D259,000 BTUH85.034.070.02100.0
PZW26DPZW26D326,250 BTUH85.034.059.02600.0
PZW35DPZW35D460,000 BTUH85.034.059.02900.0
PZW43DPZW43D556,000 BTUH100.034.059.03200.0

Air-cooled Process Chillers, Split-system, Single Stage Scroll, with Tank

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
IEZAT1SIEZAT1S14,000 BTUH36.034.065.0550.0
IEZAT1.5SIEZAT1.5S18,000 BTUH36.034.065.0600.0
IEZAT2SIEZAT2S22,000 BTUH36.034.065.0650.0
IEZAT2.5SIEZAT2.5S28,800 BTUH36.034.065.0700.0
IEZAT3SIEZAT3S36,000 BTUH36.034.065.0800.0
IEZAT4SIEZAT4S49,200 BTUH46.034.068.5850.0
IEZAT4.5SIEZAT4.5S51,600 BTUH46.034.068.5875.0
IEZAT5SIEZAT5S55,200 BTUH46.034.068.5900.0
IEZAT7SIEZAT7S75,600 BTUH75.034.068.51100.0
IEZAT8SIEZAT8S84,000 BTUH75.034.070.01150.0
IEZAT9SIEZAT9S98,400 BTUH75.034.070.01250.0
IEZAT11SIEZAT11S122,400 BTUH75.034.070.01300.0

Air-cooled Process Chillers, Split-system, Dual Stage Scroll, with Tank

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
IEZAT7DIEZAT7D73,200 BTUH75.034.070.01350.0
IEZAT9DIEZAT9D96,000 BTUH75.034.070.01400.0
IEZAT9.5DIEZAT9.5D102,000 BTUH75.034.070.01450.0
IEZAT10DIEZAT10D108,000 BTUH75.034.070.01500.0
IEZAT13DIEZAT13D147,000 BTUH75.034.070.01700.0
IEZAT15DIEZAT15D167,000 BTUH75.034.070.01800.0
IEZAT18DIEZAT18D190,800 BTUH85.034.070.01900.0
IEZAT22DIEZAT22D238,800 BTUH85.034.070.02100.0
IEZA26DIEZA26D302,000 BTUH85.034.042.01500.0
IEZA35DIEZA35D406,000 BTUH85.034.042.01600.0
IEZA43DIEZA43D500,000 BTUH85.034.042.01700.0

Large Semi Plant and OEM Semi Chillers

In the table provided below you will find our current list of process chillers for Large Semi-conductor Plant & OEM Semi-conductor applications.

Air-cooled Process Chillers, Packaged, Single Stage Scroll, Tankless

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
PZA1SPZA1S14,200 BTUH36.034.044.0260.0
PZA1.5SPZA1.5S21,500 BTUH36.034.044.0265.0
PZA2SPZA2S24,100 BTUH36.034.044.0265.0
PZA2.5SPZA2.5S34,800 BTUH36.034.044.0295.0
PZA3SPZA3S39,200 BTUH36.034.048.0490.0
PZA4SPZA4S50,000 BTUH46.034.048.0490.0
PZA4.5SPZA4.5S54,000 BTUH46.034.048.0500.0
PZA5SPZA5S60,000 BTUH46.034.048.0500.0
PZA7SPZA7S81,000 BTUH75.034.048.0650.0
PZA8SPZA8S91,000 BTUH75.034.048.0650.0
PZA9SPZA9S106,000 BTUH75.034.048.0690.0
PZA11SPZA11S132,000 BTUH75.034.048.0875.0

Air-cooled Process Chillers, Packaged, Dual Stage Scroll, Tankless

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
PZA7DPZA7D80,100 BTUH75.034.048.0875.0
PZA9DPZA9D106,400 BTUH75.034.048.0900.0
PZA9.5DPZA9.5D111,800 BTUH75.034.048.0950.0
PZA10DPZA10D118,000 BTUH75.034.048.0950.0
PZA13DPZA13D160,000 BTUH85.040.049.0985.0
PZA15DPZA15D183,500 BTUH85.040.049.01000.0
PZA18DPZA18D209,200 BTUH85.040.049.01100.0
PZA22DPZA22D264,200 BTUH66.075.051.01150.0
PZA26DPZA26D302,000 BTUH180.046.054.02600.0
PZA35DPZA35D406,000 BTUH180.088.054.02900.0
PZA43DPZA43D500,000 BTUH180.088.054.03200.0
PZA52DPZA52D612,000 BTUH180.088.054.04000.0

Air-cooled Process Chillers, Packaged, Dual Stage Semi-hermetic, Tankless

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight Inches
PSA16DPSA16D188,400 BTUH180.045.055.0
PSA19DPSA19D222,000 BTUH180.045.055.0
PSA22DPSA22D265,200 BTUH180.045.055.0
PSA25DPSA25D300,000 BTUH232.045.055.0
PSA33DPSA33D392,400 BTUH180.089.055.0
PSA37DPSA37D446,400 BTUH180.089.055.0
PSA45DPSA45D550,000 BTUH180.089.055.0
PSA55DPSA55D652,000 BTUH232.089.057.0
PSA62DPSA62D740,000 BTUH232.089.057.0
PSA71DPSA71D856,000 BTUH232.089.057.0
PSA88DPSA88D1,054,000 BTUH232.089.057.0

Air-cooled Process Chillers, Split-system, Dual Stage Semi-hermetic, Tankless

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight Inches
IESA16DIESA16D188,400 BTUH85.034.045.0
IESA19DPDF222,000 BTUH85.034.045.0
IESA22DPDF265,200 BTUH85.034.062.0
IESA25DPDF300,000 BTUH85.034.062.0
IESA33DPDF392,400 BTUH85.034.062.0
IESA37DPDF446,400 BTUH85.034.062.0
IESA45DPDF550,000 BTUH110.034.062.0
IESA55DPDF652,000 BTUH110.034.062.0
IESA62DPDF740,000 BTUH110.034.062.0
IESA71DPDF856,000 BTUH120.034.068.0
IESA88DPDF1,054,000 BTUH120.034.068.0

Water-cooled Process Chillers, Packaged, Single Stage Scroll, Tankless

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
PZW1SPZW1S12,700 BTUH36.034.036.0260.0
PZW1.5SPZW1.5S20,100 BTUH36.034.036.0265.0
PZW2SPZW2S23,300 BTUH36.034.036.0265.0
PZW2.5SPZW2.5S35,799 BTUH36.034.036.0295.0
PZW3SPZW3S42,100 BTUH36.034.036.0490.0
PZW4SPZW4S51,500 BTUH46.034.036.0490.0
PZW4.5SPZW4.5S53,500 BTUH46.034.036.0500.0
PZW5SPZW5S62,700 BTUH46.034.036.0500.0
PZW7SPZW7S81,600 BTUH46.034.036.0650.0
PZW8SPZW8S92,400 BTUH46.034.036.0650.0
PZW9SPZW9S108,500 BTUH46.034.036.0690.0
PZW11SPZW11S138,500 BTUH46.034.036.0750.0

Water-cooled Process Chillers, Packaged, Dual Stage Scroll, Tankless

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
PZW7DPZW7D84,200 BTUH65.034.036.0875.0
PZW9DPZW9D103,000 BTUH65.034.036.0900.0
PZW9.5DPZW9.5D107,000 BTUH65.034.036.0950.0
PZW10DPZW10D125,400 BTUH65.034.036.0950.0
PZW13DPZW13D163,200 BTUH75.034.036.0985.0
PZW15DPZW15D184,800 BTUH75.034.036.01000.0
PZW18DPZW18D217,000 BTUH75.034.036.01000.0
PZW22DPZW22D277,000 BTUH75.034.036.01150.0
PZW26DPZW26D326,250 BTUH85.034.059.02600.0
PZW35DPZW35D460,000 BTUH85.034.059.02900.0
PZW43DPZW43D556,000 BTUH100.034.059.03200.0
PZW52DPZW52D633,000 BTUH100.034.059.04000.0

Water-cooled Process Chillers, Packaged, Dual Stage Semi-hermetic, with Tank

Model No.Data Sheet DownloadCooling CapacityLength InchesWidth InchesHeight InchesWeight LBS
PSW16DPSW16D210,000 BTUH85.034.070.01240.0
PSW19DPDF249,000 BTUH85.034.070.01320.0
PSW22DPDF308,000 BTUH85.034.075.01410.0
PSW25DPDF320,000 BTUH85.034.075.01790.0
PSW33DPDF422,000 BTUH85.034.075.01960.0
PSW37DPDF484,000 BTUH85.034.075.02120.0
PSW45DPDF600,000 BTUH110.034.075.02240.0
PSW55DPDF694,000 BTUH110.034.075.02490.0
PSW62DPDF866,000 BTUH110.034.075.02870.0
PSW71DPDF936,000 BTUH120.034.078.03355.0
PSW88DPDF1,128,000 BTUH120.034.078.03815.0

Request a Quote

You can get a chiller price 24/7/365 from our automated on-line system in minutes.

Need Chiller Design Assistance?

To receive chiller system design assistance 24/7, call us at 877-988-5464.